{"id":593,"date":"2020-06-18T15:00:51","date_gmt":"2020-06-18T06:00:51","guid":{"rendered":"https:\/\/xmatcorp.com\/?page_id=593"},"modified":"2020-12-18T14:01:00","modified_gmt":"2020-12-18T05:01:00","slug":"piezoelectric-sensor","status":"publish","type":"page","link":"https:\/\/xmatcorp.com\/en\/piezoelectric-sensor\/","title":{"rendered":"Piezoelectric Sensor"},"content":{"rendered":"\n<h3 class=\"wp-block-heading\">New Sensing technology using new materials (crystals) from Tohoku University<\/h3>\n\n\n\n<div class=\"wp-block-media-text alignwide is-stacked-on-mobile\"><figure class=\"wp-block-media-text__media\"><img loading=\"lazy\" decoding=\"async\" width=\"721\" height=\"671\" src=\"https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_mechanism_en.png\" alt=\"\" class=\"wp-image-771 size-full\" srcset=\"https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_mechanism_en.png 721w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_mechanism_en-300x279.png 300w\" sizes=\"auto, (max-width: 721px) 100vw, 721px\" \/><\/figure><div class=\"wp-block-media-text__content\">\n<h4 class=\"wp-block-heading\">Frequency is decreased by mass load effect of deposited on the surface of the sensing crystal.<br>This crystal microbalance mechanism enables to detect weight as little as nanogram level by frequency variation \u201c\u0394f\u201d.<\/h4>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-media-text alignwide is-stacked-on-mobile\"><figure class=\"wp-block-media-text__media\"><img loading=\"lazy\" decoding=\"async\" width=\"1268\" height=\"810\" src=\"https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_application_en.png\" alt=\"\" class=\"wp-image-773 size-full\" srcset=\"https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_application_en.png 1268w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_application_en-300x192.png 300w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_application_en-768x491.png 768w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/12\/Piezoelectric_sensor_application_en-1200x767.png 1200w\" sizes=\"auto, (max-width: 1268px) 100vw, 1268px\" \/><\/figure><div class=\"wp-block-media-text__content\">\n<h4 class=\"wp-block-heading\">It is applied to the high temperature of \u201cALD process&#8221; used for the film deposition process of the most advanced semiconductors.<br>Although it is possible to expect reduction of crystal defects and new high-performance in the film due to the high temperature, the conventional measurement method makes it impossible to measure reliable data because the quartz crystal is unstable in a high temperature environment.<\/h4>\n\n\n\n<h4 class=\"wp-block-heading\"><strong><span class=\"has-inline-color has-vivid-red-color\"><span style=\"text-decoration: underline;\" class=\"underline\">We have developed a film deposition process sensor using a new material that is stable even in a high temperature environment.<\/span><\/span><\/strong><\/h4>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n<\/div><\/div>\n\n\n\n<figure class=\"wp-block-image alignwide size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1500\" height=\"899\" src=\"https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/06\/Piezoelectric-Sensor-English2-1-1500x899.png\" alt=\"\" class=\"wp-image-619\" srcset=\"https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/06\/Piezoelectric-Sensor-English2-1-1500x899.png 1500w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/06\/Piezoelectric-Sensor-English2-1-300x180.png 300w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/06\/Piezoelectric-Sensor-English2-1-768x460.png 768w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/06\/Piezoelectric-Sensor-English2-1-1536x920.png 1536w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/06\/Piezoelectric-Sensor-English2-1-2048x1227.png 2048w, https:\/\/xmatcorp.com\/wp-content\/uploads\/2020\/06\/Piezoelectric-Sensor-English2-1-1200x719.png 1200w\" sizes=\"auto, (max-width: 1500px) 100vw, 1500px\" \/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading\">Quartz used in conventional sensors causes deterioration of piezoelectric performance and composition abnormalities such as crystal twinning at over 300 \u00b0C, but the newly developed piezoelectric crystal can withstand high temperatures from 300 \u00b0C to nearly 1000 \u00b0C.<br>In addition, there is little frequency deviation due to temperature, enabling highly accurate sensing.<br>In the future, we plan to take advantage of this material and aim to develop applications in different fields such as pressure sensors under high-temperature.<\/h4>\n","protected":false},"excerpt":{"rendered":"<p>New Sensing technology using new materials (crystals) from Tohoku University Frequency is decreased by mass load effect of deposited on the surface of the sensing&hellip;<\/p>\n","protected":false},"author":187218715,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_crdt_document":"","jetpack_post_was_ever_published":false,"_locale":"en_US","_original_post":"https:\/\/xmatcorp.com\/?page_id=254","footnotes":""},"class_list":["post-593","page","type-page","status-publish","hentry","en-US"],"aioseo_notices":[],"jetpack_shortlink":"https:\/\/wp.me\/Pc3R92-9z","_links":{"self":[{"href":"https:\/\/xmatcorp.com\/wp-json\/wp\/v2\/pages\/593","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/xmatcorp.com\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/xmatcorp.com\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/xmatcorp.com\/wp-json\/wp\/v2\/users\/187218715"}],"replies":[{"embeddable":true,"href":"https:\/\/xmatcorp.com\/wp-json\/wp\/v2\/comments?post=593"}],"version-history":[{"count":0,"href":"https:\/\/xmatcorp.com\/wp-json\/wp\/v2\/pages\/593\/revisions"}],"wp:attachment":[{"href":"https:\/\/xmatcorp.com\/wp-json\/wp\/v2\/media?parent=593"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}