New Sensing technology using new materials (crystals) from Tohoku University

Frequency is decreased by mass load effect of deposited on the surface of the sensing crystal.
This crystal microbalance mechanism enables to detect weight as little as nanogram level by frequency variation “Δf”.

It is applied to the high temperature of “ALD process” used for the film deposition process of the most advanced semiconductors.
Although it is possible to expect reduction of crystal defects and new high-performance in the film due to the high temperature, the conventional measurement method makes it impossible to measure reliable data because the quartz crystal is unstable in a high temperature environment.
We have developed a film deposition process sensor using a new material that is stable even in a high temperature environment.
